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Vacuum Science and Technology: Course Outline (PH-619)

Vacuum Science & Technology B emphasizes processing, measurement and phenomena associated with micrometer and nanometer structures and devices.

Course Outline

  • Introduction: What is a vacuum?
  • Applications of Vacuum Techniques.
  • History of Vacuum Techniques.
  • Rarefied Gas Theory.
  • Physical states of matter.
  • Gas laws.
  • Motion of molecules.
  • Mean free path.
  • Transport phenomena in viscous and molecular state.
  • Thermal diffusion and conductivity.
  • Gas flow at low pressure.
  • Flow regimes.
  • Conductance and throughput.
  • Conductances in viscous and molecular flow.
  • Intermediate flow.
  • Vacuum Pumps.
  • Types: Mechanical, Vapor stream, Chemical, Sorption and Cryopumps.
  • Measurement of low pressure.
  • Classification of vacuum gages.
  • Mechanical.
  • Liquid.
  • Thermal conductivity.
  • Ionisation.
  • Viscosity and Knudsen gauges.
  • Leak detection.
  • Industrial Vacuum Systems.

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