Vacuum Science and Technology: Course Outline (PH-619)

• Introduction: What is a vacuum?
• Applications of Vacuum Techniques.
• History of Vacuum Techniques.
• Rarefied Gas Theory.
• Physical states of matter.
• Gas laws.
• Motion of molecules.
• Mean free path.
• Transport phenomena in viscous and molecular state.
• Thermal diffusion and conductivity.
• Gas flow at low pressure.
• Flow regimes.
• Conductance and throughput.
• Conductances in viscous and molecular flow.
• Intermediate flow.
• Vacuum Pumps.
• Types: Mechanical, Vapor stream, Chemical, Sorption and Cryopumps.
• Measurement of low pressure.
• Classification of vacuum gages.
• Mechanical.
• Liquid.
• Thermal conductivity.
• Ionisation.
• Viscosity and Knudsen gauges.
• Leak detection.
• Industrial Vacuum Systems.

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