Introduction: What is a vacuum? Applications of Vacuum Techniques; History of Vacuum Techniques;
Rarefied Gas Theory: Physical states of matter; Gas laws; Motion of molecules; Mean free path; Transport phenomena in viscous and molecular state; Thermal diffusion and conductivity;
Gas flow at low pressure: Flow regimes, conductance and throughput; Conductances in viscous and molecular flow; Intermediate flow;
Vacuum Pumps: Types: Mechanical, Vapor stream, Chemical, Sorption and Cryopumps;
Measurement of low pressure: Classification of vacuum gages: Mechanical, Liquid, Thermal conductivity, Ionisation, Viscosity and Knudsen gauges. Leak detection; Industrial Vacuum Systems; Molecular flow and viscous flow regimes, Molecular flow through tubes and apertures, Interaction of gases with solid surfaces, Outgassing and its effects on vacuum systems, Material selection for vacuum environments, Surface treatments and coatings for minimizing outgassing and contamination, Principles and challenges of achieving ultra-high vacuum conditions, UHV-compatible materials and components, Bakeout and conditioning of UHV systems, Physical and chemical vapor deposition techniques, Sputtering, evaporation, and ion implantation, Applications in microelectronics, optics, and coatings
Vacuum Technology
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This third updated and enlarged edition includes about 350 new papers added to the previous list of references. The contents have been revised and updated in the areas of: Thermonuclear pumping; Throughput; Transmission probability; Electronic circuit simulation; Sorption on charcoal; Desorption from porous materials; Desorption from stainless steel, A1 alloys (outgassing rates); Ion bombardment (glow discharge) cleaning; Clay - type pumps; Turbomolecular pumps-improvements; Cryosorption; NEG (Nonevaporable getter) linear pumps; Standards for measurement of pumping speed (Recommended practice, test domes); Spinning rotor gauges; Quartz friction gauges; Increase of sensitivity of thermocouple gauges; Lubrication in vacuum; Calibration of diffusion leaks; Improvements in leak detection. Besides its role in educational activities, the book will also serve as a handbook for those working in this field, or in fields connected to Vacuum Technology. Comments from the press on the second edition: "A valuable reference work for undergraduate libraries . . . well organized and clearly written and strikes an appropriate balance between completeness and attention to fundamentals. The index and references are unusually complete. Recommended". (Choice) "Roth's new book contains a comprehensive collection of information on rarefied-gas flow, physical and chemical phenomena associated with vacuum technology, the production and measurement of high vacuum and sealing and leak-detection techniques. One finds a wealth of equations, numerical examples, tables, graphs and monographs. The book is more a handbook than a source book of latest developments. It is suitable for teaching, but the wealth of organized data should also make the book highly useful to engineers" . . . (Physics Today)
Vacuum technology: an introduction
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Introduction to Vacuum Technology
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Vacuum systems are critical to many industries. They are vital to establishing required process pressures, establishing a clean process environment, and removing reaction by-products from the process chamber. This text, a revision and expansion of David Hata’s Introduction to Vacuum Technology published in 2008, addresses basic topics in vacuum technology for individuals tasked with maintaining vacuum systems and instructors teaching technician-level courses. The topics are carefully curated to the needs of technicians in a production environment and the types of vacuum systems used, and the accompanying laboratory manual and instructor’s guide support the delivery of lecture-laboratory courses.
This book approaches vacuum systems from a pressure regime viewpoint, covering basic vacuum science, followed by the rough vacuum regime, including gas load, pumping mechanisms, pressure measurement, vacuum system construction, and basic troubleshooting concepts. The study of high vacuum systems follows and the same topics are revisited, and finally the topics of leak detection and residual gas analysis are discussed.
Handbook of Vacuum Science and Technology
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